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高効率でOHラジカルを生成。コンパクト設計で省スペースに設置可能。水銀レスで深紫外LEDを搭載
当社が提供する「ラジカル洗浄ユニット」は、独自の深紫外LED発光体を採用し、 オゾン水などの洗浄液からOHラジカルを効率良く生成できるコンパクトな製品です。 UV-C照射によるオゾン水分解技術により、高純度洗浄を求める微細加工工程において、 有機汚染物やフォトレジスト残渣の除去、金属汚染の抑制などに貢献します。 接液部は合成石英で構成されており、クロスコンタミを防止。 水銀を使用しないLED仕様で、長期間にわたり安定運用が可能です。 デモ機も用意しておりますので、ご希望の方はお気軽にご連絡ください。 【特長】 ■コンパクトサイズで省スペースに設置 ■リニアな発光制御が可能 ■環境負荷を抑えつつ高効率な洗浄が可能 ■半導体製造、医療機器、食品加工など応用分野が広い ■ユニット内部の分割制御により、劣化時のフィードバック設定が可能 ※詳しくは資料をご覧ください。お問い合わせもお気軽にどうぞ。
High-efficiency OH radical generation, space-saving design, mercury-free UV-C LED equipped.
In the semiconductor industry’s precision cleaning processes, advancements in microfabrication technology have led to demands for higher cleaning accuracy and reduced environmental impact. In particular, the complete removal of organic contaminants and photoresist residues, as well as the suppression of metal contamination, are critical challenges that affect product quality and yield. Radical cleaning units achieve high-purity cleaning and contribute to solving these issues. 【Usage Scenarios】 - SPM-free photoresist removal process - Suppression of organic and metal contamination - Metal film oxidation prevention process 【Benefits of Implementation】 - Improved cleaning efficiency - Reduced environmental impact - Enhanced product quality
High-efficiency OH radical generation, compact design, mercury-free LED equipped.
In the cleaning of experimental equipment at research institutions, high cleaning performance is required to prevent contamination and obtain accurate experimental results. In particular, the removal of fine organic materials and metal contaminants is a crucial factor that affects the precision of experiments. Radical cleaning units efficiently generate OH radicals to address these challenges. 【Usage Scenarios】 - Cleaning of experimental equipment - Cleaning of fine parts - Metal contamination countermeasures 【Benefits of Implementation】 - Improved experimental accuracy due to high cleaning power - Reduced environmental impact - Lower running costs
High-efficiency OH radical generation, compact design, mercury-free LED equipped.
In the pharmaceutical industry, advanced decontamination technologies are required to minimize the risk of contamination in the manufacturing process. In particular, in the pharmaceutical manufacturing environment, trace amounts of organic matter or metal contamination can have a serious impact on product quality. Our radical cleaning unit efficiently generates OH radicals to address these challenges. 【Application Scenarios】 * Decontamination of pharmaceutical manufacturing equipment * Removal of contaminants in clean rooms * Cleaning of laboratory instruments in research and development facilities 【Benefits of Implementation】 * Reduction of contamination risk * Improvement of product quality * Streamlining of the manufacturing process
Sterilizing food with OH radicals. Compact design for space-saving.
In the food processing industry, maintaining product quality and ensuring safety are crucial. In particular, effective sterilization methods are required to suppress the growth of bacteria and mold that can cause foodborne illnesses. Traditional sterilization methods carry the risk of quality degradation due to the use of chemicals or high-temperature heating. Our radical cleaning unit generates OH radicals to efficiently sterilize bacteria and microorganisms attached to food. With an LED design that does not use mercury, it achieves safe sterilization without compromising food quality. 【Usage Scenarios】 - Sterilization on food processing lines - Sterilization of food packaging materials - Sterilization of food manufacturing equipment 【Benefits of Implementation】 - Preservation of food quality - Reduction of foodborne illness risks - Safe food provision
Increased sterilization efficiency with OH radicals! Compact design for space-saving.
In the medical device industry, advanced sterilization processes are required. Particularly for medical instruments that come into direct contact with the patient's body, such as surgical tools and endoscopes, reliable sterilization is essential to reduce the risk of infections. Inadequate sterilization can lead to health hazards for patients. Our radical cleaning unit generates OH radicals, achieving efficient sterilization processes. 【Usage Scenarios】 - Sterilization of surgical instruments - Sterilization of endoscopes - Sterilization of medical tubes 【Benefits of Implementation】 - Reduction of infection risks due to high sterilization effectiveness - Space-saving design due to compact structure - Reduced environmental impact by using mercury-free LEDs
High-efficiency OH radical generation! Space-saving design optimizes the surface treatment of electronic components.
In the surface treatment process of the electronic components industry, the removal of fine organic and metal contaminants significantly affects product quality and reliability. Particularly in electronic components where high density is advancing, it is crucial to thoroughly eliminate contamination and perform high-quality surface treatment. The radical cleaning unit addresses these challenges through highly efficient OH radical generation. 【Application Scenarios】 - Photoresist removal - Prevention of metal film oxidation - Removal of organic and metal contamination 【Benefits of Implementation】 - Improved cleaning efficiency - Reduced environmental impact - Enhanced product quality
High-efficiency OH radical generation, space-saving design. For foreign matter removal in display manufacturing.
In the display industry, the removal of foreign substances, which affects product quality, is crucial. In particular, the presence of fine foreign particles can lead to display malfunctions and a decrease in product lifespan. Our radical cleaning unit efficiently generates OH radicals and strongly supports the removal of foreign substances in the display manufacturing process. 【Application Scenarios】 - Removal of foreign substances in the display manufacturing process - Removal of photoresist residues - Suppression of metal contamination 【Benefits of Implementation】 - Quality improvement through high-purity cleaning - Cost reduction through space-saving design - Reduction of environmental impact
